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水質指標

DIW

UPW

對應的處理方法

Resistivity(MQ ·cm)

≥16.5MΩ-cm

≥18.0MQ ·cm

/

Particle((0.5μm)

≤50 ea/ml

≤10 ea/ml

MMF/MF/RO/UF

Bacteria

≤10 Col/100ml

≤5 Col/100ml

MF/UV/UF

TOC(mg/L)

≤50ppb

≤20ppb

ACF&UV(185nm)

Silica(mg/L)

≤20ppb

≤5ppb

RO/UF/IX

DO(mg/L)

≤50ppb

≤30ppb

MDG

Na(mg/L)

≤0.5ppb

≤0.1ppb

Cation lon Exchanger

K(mg/L)

≤0.5ppb

≤0.1ppb

Cation lon Exchanger

Ca(mg/L)

/

/

Cation lon Exchanger

CO3-2(mg/L)

/

/

Anion lon Exchanger

HCO3-(mg/L)

/

/

Anion lon Exchanger

Cl-(mg/L)

/

≤1.0ppb

ACF &Anion lon Exchanger

SO4-2(mg/L)

/

/